Title: Chemical and electrical dopant profiling for P-type junctions formed by solid phase epitaxial regrowth
Authors: Pawlak, Bartek ×
Lindsay, Richard
Kittl, Jorge
Vandervorst, Wilfried
Clarysse, Trudo
Hoflijk, Ilse
Dieu, B
Geenen, Luc
Brijs, Bert #
Issue Date: 2003
Publisher: AIP
Conference: Characterization and Metrology for ULSI location:Leuven Belgium date:24/03/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.