|ITEM METADATA RECORD
|Title: ||Chemical and electrical dopant profiling for P-type junctions formed by solid phase epitaxial regrowth|
|Authors: ||Pawlak, Bartek ×|
Brijs, Bert #
|Issue Date: ||2003 |
|Conference: ||Characterization and Metrology for ULSI location:Leuven Belgium date:24/03/03|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Electrical Engineering - miscellaneous|
× corresponding author|
# (joint) last author|
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