Title: Chemical and electrical dopant evolution during solid phase epitaxial regrowth
Authors: Pawlak, Bartek ×
Lindsay, Richard
Vandervorst, Wilfried
Kittl, Jorge
Surdeanu, Radu
Duffy, Ray
Stolk, P #
Issue Date: 2003
Host Document: pages:227-233
Conference: Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic. location:Leuven Belgium date:28/04/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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