|ITEM METADATA RECORD
|Title: ||Chemical and electrical dopant evolution during solid phase epitaxial regrowth|
|Authors: ||Pawlak, Bartek|
|Issue Date: ||2003 |
|Host Document: ||Proc. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic. pages:227-233|
|Conference: ||Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic. location:Leuven Belgium date:28/04/03|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Electrical Engineering - miscellaneous|
|Files in This Item:
There are no files associated with this item.
Request a copy
All items in Lirias are protected by copyright, with all rights reserved.
© Web of science