|ITEM METADATA RECORD
|Title: ||The role of fluorine with Ge pre-amorphisation in forming PMOS junctions for the 65-nm CMOS technology node|
|Authors: ||Pawlak, Bartek ×|
Van der Jeugd, Kees #
|Issue Date: ||2003 |
|Host Document: ||pages:99-104|
|Conference: ||Advanced Short-Time Thermal Processing for Si-based CMOS Devices location:Leuven Belgium|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Electrical Engineering - miscellaneous|
× corresponding author|
# (joint) last author|
|Files in This Item:
There are no files associated with this item.
Request a copy
All items in Lirias are protected by copyright, with all rights reserved.