Title: The role of fluorine with Ge pre-amorphisation in forming PMOS junctions for the 65-nm CMOS technology node
Authors: Pawlak, Bartek ×
Lindsay, Richard
Surdeanu, Radu
Pagès, Xavier
Vandervorst, Wilfried
Van der Jeugd, Kees #
Issue Date: 2003
Publisher: ECS
Host Document: pages:99-104
Conference: Advanced Short-Time Thermal Processing for Si-based CMOS Devices location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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