Title: CMOS scaling beyond the 90 nm CMOS technology node: shallow junction and integration challenges
Authors: Dachs, Charles ×
Surdeanu, Radu
Pawlak, Bartek
Doornbos, Gerben
Duffy, R
Heringa, Anco
Ponomarev, Youri
Venezia, Vincent
Van Dal, Mark
Stolk, P
Lindsay, Richard
Henson, Kirklen
Dieu, B
Geenen, Luc
Hoflijk, Ilse
Richard, Olivier
Clarysse, Trudo
Brijs, Bert
Vandervorst, Wilfried
Pagès, Xavier #
Issue Date: 2003
Host Document: pages:15-22
Conference: Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic. location:Leuven Belgium date:27/04/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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