Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic., Location: Leuven Belgium
Publication date:
2003-01-01
Pages:
15 -
22
Author:
Dachs, Charles
Surdeanu, Radu ; Pawlak, Bartek ; Doornbos, Gerben ; Duffy, R ; Heringa, Anco ; Ponomarev, Youri ; Venezia, Vincent ; Van Dal, Mark ; Stolk, P ; Lindsay, Richard ; Henson, Kirklen ; Dieu, B ; Geenen, Luc ; Hoflijk, Ilse ; Richard, Olivier ; Clarysse, Trudo ; Brijs, Bert ; Vandervorst, Wilfried ; Pagès, Xavier