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Title: Critical issues in the integration of Copper and low-k dielectrics
Authors: Donaton, R. A ×
Coenegrachts, Bart
Maex, Karen
Struyf, Herbert
Vanhaelemeersch, Serge
Beyer, Gerald
Richard, Emmanuel
Vervoort, Iwan
Fyen, Wim
Grillaert, Joost
van der Groen, Sonja
Stucchi, Michele
De Roest, David #
Issue Date: 1999
Host Document: pages:262-264
Conference: Proceedings of the International Interconnect Technology Conference - IITC; San Francisco, CA, USA.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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