Title: Influence of SiGe thickness on the Co/SiGe/Si solid state reaction
Authors: Donaton, R. A ×
Jin, S
Bender, Hugo
Maex, Karen
Vantomme, André
Langouche, Guido #
Issue Date: 1999
Host Document: pages:151-156
Conference: Advanced Interconnects and Contacts; MRS Spring Meeting 1999; April 1999; San Francisco, CA, USA.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Nuclear and Radiation Physics Section
× corresponding author
# (joint) last author

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