Title: Band gap of ALCVD mixed oxide AlZrO and HfAlO measured by XPS
Authors: Petry, Jasmine
Vandervorst, Wilfried
Conard, Thierry
Issue Date: 2003
Conference: E-MRS Spring Meeting Symposium I: Functional Metal Oxides - Semiconductor Structures location:Leuven Belgium date:10/06/03
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

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