Title: Selective single-wafer wet etching of Hf-based layers
Authors: Snow, Jim ×
Kraus, Harald
Kovacs, Fredi
Claes, Martine
Paraschiv, Vasile
Vos, Rita
Mertens, Paul
De Gendt, Stefan
Heyns, Marc
Archer, Leo #
Issue Date: 2005
Publisher: ICG Publishing Ltd
Series Title: Semiconductor Fabtech issue:28 pages:115-120
ISSN: 1355-8633
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Molecular Design and Synthesis
× corresponding author
# (joint) last author

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