Title: Substrate removal of AlGaN/GaN HEMTs using laser lift-off
Authors: Das, Johan
Ruythooren, Wouter
Vandersmissen, Raf
Derluyn, Joff
Germain, Marianne
Borghs, Gustaaf
Issue Date: 2005
Host Document: Physica Status Solidi C vol:2 issue:7 pages:2655-2658
Conference: International Workshop on Nitrides Semiconductors location:Pittsburgh, PA date:19-23 July 2004
ISSN: 1610-1634
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Physics and Astronomy - miscellaneous

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