|ITEM METADATA RECORD
|Title: ||Defectivity study of Cu metallization process by dark- and bright-field inspection|
|Authors: ||Carbonell, Laure ×|
Mertens, Paul #
|Issue Date: ||2003 |
|Conference: ||Ultra Clean Processing of Silicon Surfaces 2002 location:Oostende Belgium date:16/09/02|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
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