Title: Defectivity study of Cu metallization process by dark- and bright-field inspection
Authors: Carbonell, Laure ×
Holsteyns, Frank
Tokei, Zsolt
O'Reilly, L
Maex, Karen
Mertens, Paul #
Issue Date: 2003
Publisher: Sci-Tech Publications
Series Title: Diffusion and Defect Data B, Solid State Phenomena vol:92 pages:281-285
Conference: Ultra Clean Processing of Silicon Surfaces 2002 location:Oostende Belgium date:16/09/02
ISSN: 1012-0394
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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