Title: Irradiation-induced damage in porous low-k materials during low-energy heavy-ion elastic recoil detection analysis
Authors: Giangrandi, Simone
Brijs, Bert
Sajavaara, Timo Pekka
Bender, Hugo
Iacopi, Francesca
Vantomme, André
Vandervorst, Wilfried
Issue Date: 2005
Conference: 17th International Conference on Ion Beam Analysis location:Leuven Belgium date:26/06/05
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Electrical Engineering - miscellaneous
Nuclear and Radiation Physics Section

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