Title: XPS study of the role of Ti and TiN caps on the Cobalt/SiO2 interface
Authors: Conard, Thierry
Kondoh, Eiichi
Vandervorst, Wilfried
Maex, Karen
Issue Date: 1998
Conference: American Vacuum Society 45th International Symposium; 2-6 November 1998; Baltimore, MD, USA. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems

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