|ITEM METADATA RECORD
|Title: ||Ion induced oxidation of silicon by oxygen and argon bombardment in combination with oxygen flooding|
|Authors: ||De Witte, Hilde|
|Issue Date: ||1998 |
|Conference: ||SIMS Europe Workshop; 4-6 October 1998; Munster, Germany.|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Electrical Engineering - miscellaneous|
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