Title: Ion induced oxidation of silicon by oxygen and argon bombardment in combination with oxygen flooding
Authors: De Witte, Hilde
Conard, Thierry
Gouttebaron, R
Magnee, R
Caudano, R
Vandervorst, Wilfried
Gijbels, Toon
Issue Date: 1998
Conference: SIMS Europe Workshop; 4-6 October 1998; Munster, Germany.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

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