Title: Improving low-temperature APCVD SiO2 passivation by rapid themal annealing for Si devices
Authors: Sivoththaman, Sivanarayanamoorthy ×
De Schepper, Patrick
Laureys, Wim
Nijs, Johan
Mertens, Robert #
Issue Date: 1998
Series Title: IEEE Electron Device Letters vol:19 issue:12 pages:505-7
ISSN: 0741-3106
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - ELECTA, Electrical Energy Computer Architectures
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science