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Title: Cost-effective cleaning for advanced Si-processing
Authors: Heyns, Marc
Bearda, Twan
Cornelissen, Ingrid
De Gendt, Stefan
Knotter, D. M
Loewenstein, Lee
Lux, Marcel
Mertens, Paul
Mertens, S
Meuris, Marc
Schaekers, Marc
Snee, Peter
Teerlinck, Ivo
Vos, Rita #
Issue Date: 1998
Conference: Technical Digest International Electron Devices Meeting - IEDM; 6-9 Dec. 1998; San Francisco, CA, USA. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
Department of Materials Engineering - miscellaneous
Department of Pharmaceutical & Pharmacological Sciences - miscellaneous
Surface and Interface Engineered Materials
# (joint) last author

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