Title: A general and simplified method for rapid evolution of electrostatic switches with varying geometries
Authors: De Coster, Jeroen ×
Tilmans, Harrie
van Beek, J.T.M
Rijks, T.G.S.M
Steeneken, P.G
Puers, Robert #
Issue Date: 2004
Host Document: pages:502-503
Conference: Technical Digest of Eurosensors XVIII location:Leuven Belgium date:12/09/04
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
ESAT - ELECTA, Electrical Energy Computer Architectures
× corresponding author
# (joint) last author

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