Title: Towards an understanding of ion beam mixing by quantitative internal profiling
Authors: Tian, Chunsheng ×
Gomez, Jose Ignacio
Beyer, Gerald
De Bisschop, Peter
Vandervorst, Wilfried
Wu, Ting-Di
D'olieslaeger, Marc #
Issue Date: 1998
Host Document: pages:351-354
Conference: SIMS XI - Secondary Ion Mass Spectrometry; 8-12 September 1997; Orlando, CA, USA. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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