Title: Influence of Boron diffusion on reliability of ultra-thin oxides
Authors: Nigam, Tanya
Degraeve, Robin
Heyns, Marc
Groeseneken, Guido
Maes, Herman
Issue Date: 1998
Conference: 29th IEEE Semiconductor Interface Specialists Conference - SISC; 3-5 Dec. 1998; San Diego, CA, USA.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Associated Section of ESAT - INSYS, Integrated Systems
Department of Materials Engineering - miscellaneous

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