|ITEM METADATA RECORD
|Title: ||Low-k materials etch and strip optimization for sub 0.25µm technology|
|Authors: ||Gao, Teng|
Van Hove, Marleen
Maex, Karen #
|Issue Date: ||1999 |
|Conference: ||Proceedings of the International Interconnect Technology Conference - IITC; San Francisco, CA, USA. location:Leuven Belgium|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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