Title: Low-k materials etch and strip optimization for sub 0.25µm technology
Authors: Gao, Teng
Gray, William
Van Hove, Marleen
Rosseel, Erik
Struyf, Herbert
Meynen, Herman
Vanhaelemeersch, Serge
Maex, Karen #
Issue Date: 1999
Conference: Proceedings of the International Interconnect Technology Conference - IITC; San Francisco, CA, USA. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
# (joint) last author

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