Title: Integration HSQ into direct-on-metal approach for 0.25um technology
Authors: Gao, Teng ×
Witvrouw, Ann
Coenegrachts, Bart
Bruynseraede, Christophe
Van Hove, Marleen
Maex, Karen #
Issue Date: 1999
Publisher: North-Holland
Host Document: Microelectronic Engineering vol:50 issue:1-4 pages:349-355
Conference: European Workshop Materials for Advanced Metallization location:Oostende, Belgium date:March 7-10 1999
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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