|ITEM METADATA RECORD
|Title: ||Integration HSQ into direct-on-metal approach for 0.25um technology|
|Authors: ||Gao, Teng ×|
Van Hove, Marleen
Maex, Karen #
|Issue Date: ||1999 |
|Host Document: ||Microelectronic Engineering vol:50 issue:1-4 pages:349-355|
|Conference: ||European Workshop Materials for Advanced Metallization location:Oostende, Belgium date:March 7-10 1999|
|Publication status: ||published|
|KU Leuven publication type: ||IMa|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
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