Title: Reliability the limit to gate oxide shrink?
Authors: Groeseneken, Guido
Degraeve, Robin
Wauters, J #
Issue Date: 1999
Series Title: European Semiconductor vol:21 issue:7 pages:23,25
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
# (joint) last author

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