Title: Tip-on-tip: a novel AFM tip configuration for the electrical characterization of semiconductor devices
Authors: Hantschel, Thomas ×
Trenkler, Thomas
Vandervorst, Wilfried
Malavé, A
Büchel, D
Kulisch, W
Oesterschulze, E #
Issue Date: 1999
Series Title: Microelectronic Engineering vol:46 issue:01/04/07 pages:113-116
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science