Title: Technology and reliability of sub-3nm oxides
Authors: Heyns, Marc ×
Nigam, Tanya
Degraeve, Robin
Mertens, Paul
Schaekers, Marc
De Gendt, Stefan
Groeseneken, Guido
Maes, Herman
Houssa, Michel
Vandewalle, N
Ausloos, M #
Issue Date: 1999
Host Document: pages:1-7
Conference: 4th Symposium on Thin Gate Oxides location:Leuven Belgium date:22/01/99
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Clinical Residents Medicine
Semiconductor Physics Section
Associated Section of ESAT - INSYS, Integrated Systems
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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