Title: Atomic layer deposition and remote plasma surface preparation for gate stack applications
Authors: Delabie, Annelies
Caymax, Matty
Brijs, Bert
Cartier, E
Geenen, Luc
Vandervorst, Wilfried
Bajolet, Philippe
Maes, J
Tsai, Wilman
De Gendt, Stefan
Heyns, Marc #
Issue Date: 2003
Host Document: pages:12-15
Conference: Proceedings AVS 4th International Conference on Microelectronics and Interfaces - ICMI location:Leuven Belgium date:03/03/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
# (joint) last author

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