ITEM METADATA RECORD
Title: Evaluation of megasonic cleaning processes
Authors: Holsteyns, Frank ×
Riskin, A
Mertens, Paul #
Issue Date: 2004
Publisher: ECS
Host Document: pages:161-167
Conference: Cleaning Technology in Semiconductor Device Manufacturing VIII: Proceedings of the International Symposium location:Leuven Belgium date:12/10/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
× corresponding author
# (joint) last author

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