|ITEM METADATA RECORD
|Title: ||Evaluation of megasonic cleaning processes|
|Authors: ||Holsteyns, Frank ×|
Mertens, Paul #
|Issue Date: ||2004 |
|Host Document: ||pages:161-167|
|Conference: ||Cleaning Technology in Semiconductor Device Manufacturing VIII: Proceedings of the International Symposium location:Leuven Belgium date:12/10/03|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Clinical Residents Medicine|
× corresponding author|
# (joint) last author|
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