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Title: Effect of oxide and W-CMP on the material properties and electromigration behaviour of layered aluminium metallizations
Authors: Heyvaert, Ilse ×
Van Hove, Marleen
Witvrouw, Ann
Maex, Karen
Saerens, Annelies
Roussel, Philippe
Bender, Hugo #
Issue Date: 2000
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:50 issue:1-4 pages:291-299
Conference: European Workshop Materials for Advanced Metallization; March 8-10, 1999; Oostende, Belgium. location:Leuven Belgium date:07-10 March 1999
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Mechanical Metallurgy Section (-)
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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