Title: Electrical properties of thin SiON/Ta2O5 gate dielectric stacks
Authors: Houssa, Michel ×
Degraeve, Robin
Mertens, Paul
Heyns, Marc
Jeon, J. S
Halliyal, A
Ogle, B #
Issue Date: 1999
Publisher: American Institute of Physics
Series Title: Journal of Applied Physics vol:86 issue:11 pages:6462-6467
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Semiconductor Physics Section
Clinical Residents Medicine
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

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