|ITEM METADATA RECORD
|Title: ||Electrical properties and reliability of ultrathin remote plasma enhanced CVD Si3N4 layers|
|Authors: ||Houssa, Michel|
van Dijk, Kitty
Stesmans, André #
|Issue Date: ||1999 |
|Conference: ||30th IEEE Semiconductor Interface Specialists Conference; 2-4 December 1999; Charleston, USA. location:Leuven Belgium|
|Publication status: ||published|
|KU Leuven publication type: ||IMa|
|Appears in Collections:||Semiconductor Physics Section|
Clinical Residents Medicine
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