Title: Electrical properties and reliability of ultrathin remote plasma enhanced CVD Si3N4 layers
Authors: Houssa, Michel
Degraeve, Robin
Pomarede, C
van Dijk, Kitty
Werkhoven, Chris
Mertens, Paul
Heyns, Marc
Stesmans, André #
Issue Date: 1999
Conference: 30th IEEE Semiconductor Interface Specialists Conference; 2-4 December 1999; Charleston, USA. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Semiconductor Physics Section
Clinical Residents Medicine
# (joint) last author

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