ITEM METADATA RECORD
Title: Polycrystalline SiGe technology for uncooled microbolometer arrays
Authors: Leonov, Vladimir
Goessens, Claus
Van Hoof, Chris
Grietens, Bob
Perova, Natalia A
Malyutenko, Volodymyr
Issue Date: 2003
Conference: Proceedings of SPIE Symposium Materials for Infrared Detectors III location:Leuven Belgium date:07/08/03
Publication status: published
KU Leuven publication type: DI
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors

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