Title: Evaluation of cleaning recipes based on ozonated water for pre-gate oxide cleaning
Authors: Jeon, J. S ×
Ogle, B
Baeyens, Martien
Mertens, Paul #
Issue Date: 1999
Host Document: pages:119-122
Conference: Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
× corresponding author
# (joint) last author

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