Title: Microstructural studies by transmission electron microscopy of the formation of ultrathin PtSi layers with novel silicidation processes
Authors: Jin, S ×
Bender, Hugo
Donaton, R. A
Maex, Karen #
Issue Date: 1999
Series Title: Journal of Materials Research vol:14 issue:6 pages:2577-2587
ISSN: 0884-2914
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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