Title: Characterisation of oxygen and oxygen-related defects in highly- and lowly-doped silicon
Authors: Simoen, Eddy ×
Claeys, Corneel
Loo, Roger
De Gryse, O
Clauws, P
Job, R
Ulyashin, A.G
Fahrner, W #
Issue Date: 2003
Series Title: Materials Science and Engineering B vol:102 issue:01/03/07 pages:207-212
ISSN: 0921-5107
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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