Title: Advanced characterization techniques for 2D-profiling and high-k materials
Authors: Vandervorst, Wilfried
Issue Date: 2002
Conference: 5th Annual Workshop on Semiconductor Advances for Future Electronics - SAFE location:Leuven Belgium date:27/11/02
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

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