Title: Dynamic SIMS for the characterization of deep-submicron technology
Authors: Vandervorst, Wilfried
Issue Date: 2002
Conference: Workshop on SIMS Solution for the Next Generation of Microelectronics: In and Offline Approaches location:Leuven Belgium date:01/10/02
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

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