|ITEM METADATA RECORD
|Title: ||Dynamic SIMS for the characterization of deep-submicron technology|
|Authors: ||Vandervorst, Wilfried|
|Issue Date: ||2002 |
|Conference: ||Workshop on SIMS Solution for the Next Generation of Microelectronics: In and Offline Approaches location:Leuven Belgium date:01/10/02|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Electrical Engineering - miscellaneous|
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