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Title: Scanning spreading resistance microscopy (SSRM) 2d carrier profiling for ultra-shallow junction characterization in deep-submicron technologies
Authors: Eyben, Pierre ×
Janssens, Tom
Vandervorst, Wilfried #
Issue Date: Dec-2005
Publisher: Elsevier Sequoia
Series Title: Materials Science and Engineering B, Solid-State Materials for Advanced Technology vol:124 pages:45-53
ISSN: 0921-5107
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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