Title: On the spatial resolution of scanning spreading resistance microscopy: experimental assessment and electro-mechanical modeling
Authors: Eyben, Pierre ×
Degryse, Dominiek
Vandervorst, Wilfried #
Issue Date: 2005
Publisher: AIP
Host Document: pages:264-269
Conference: Characterization and Metrology for ULSI Technology location:Leuven Belgium date:15/03/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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