Title: Characterisation of tungsten nitride barrier layer for copper metallisation
Authors: Jin, S ×
Li, H
Bender, Hugo
Heyvaert, Ilse
Maex, Karen #
Issue Date: 1999
Host Document: pages:541-544
Conference: 11th International Conference of Semiconducting Materials; 22-25 March 1999; Oxford, UK.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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