|ITEM METADATA RECORD
|Title: ||Characterisation of tungsten nitride barrier layer for copper metallisation|
|Authors: ||Jin, S ×|
Maex, Karen #
|Issue Date: ||1999 |
|Host Document: ||pages:541-544|
|Conference: ||11th International Conference of Semiconducting Materials; 22-25 March 1999; Oxford, UK.|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
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