Title: The effect of elevated temperature on the reliability of very thin oxide films
Authors: Kaczer, Ben ×
Degraeve, Robin
Pangon, Nadège
Nigam, Tanya
Groeseneken, Guido #
Issue Date: 1999
Host Document: pages:356-359
Conference: ESSDERC'99 - Proceedings of the 29th European Solid-State Device Research Conference; 13-15 September 1999; Leuven, Belgium. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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