Title: Thermal recovery from stress-induced high-k dielectric film degradation
Authors: O'Sullivan, Barry J. ×
Pantisano, Luigi
Roussel, Philippe
Degraeve, Robin
Groeseneken, Guido
De Gendt, Stefan
Heyns, Marc #
Issue Date: Feb-2007
Series Title: Journal of Applied Physics vol:101 issue:4 pages:044515-1-044515-6
Article number: 044515
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Molecular Design and Synthesis
Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

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