Title: Metal gates for advanced CMOS technologies
Authors: Kittl, Jorge
Kmieciak, Malgorzata
Lauwers, Anne
Schram, Tom
Pourtois, Geoffrey
Veloso, Anabela
Yu, HongYu
Hoffmann, Thomas Y
Demeurisse, Caroline
Vrancken, Christa
De Gendt, Stefan
Absil, Philippe
Biesemans, Serge #
Issue Date: 2006
Host Document: pages:258-267
Conference: Proceedings SEMI-ECS International Semiconductor Technology Conference - ISTC location:Leuven Belgium date:21/03/06
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Molecular Design and Synthesis
# (joint) last author

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