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Title: Metal gate/high-k stacks for nano-CMOS devices
Authors: Kittl, Jorge
Lauwers, Anne
Hoffmann, Thomas Y
Veloso, Anabela
Kmieciak, Malgorzata
Demeurisse, Caroline
Schram, Tom
Pourtois, Geoffrey
Kubicek, Stefan
Niwa, Masaaki
Van Dal, Mark
Yu, HongYu
Vrancken, Christa
De Gendt, Stefan
Absil, Philippe
Biesemans, Serge #
Issue Date: 2006
Host Document: pages:103-106
Conference: Proceedings ULIS - 7th European Workshop on Ultimate Integration in Silicon location:Leuven Belgium date:20/04/06
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Molecular Design and Synthesis
# (joint) last author

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