Title: Characterization of HF-last cleaning of ion-implanted Si surfaces
Authors: Kondoh, Eiichi ×
Baklanov, Mikhaïl
Maex, Karen #
Issue Date: 1999
Host Document: pages:271-274
Conference: Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.