Title: A chemical role of refractory metal caps in Co silicidation: Evidence of SiO2 reduction by Ti cap
Authors: Kondoh, Eiichi ×
Conard, Thierry
Brijs, Bert
Jin, S
Bender, Hugo
de Potter de ten Broeck, Muriel
Maex, Karen #
Issue Date: 1999
Publisher: Published for the Materials Research Society by the American Institute of Physics
Series Title: Journal of Materials Research vol:14 issue:11 pages:4402-4408
ISSN: 0884-2914
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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