Title: Measurements of trace gaseous ambient impurities on an atmospheric pressure rapid thermal processor
Authors: Kondoh, Eiichi ×
Vereecke, Guy
Heyns, Marc
Maex, Karen
Gutt, T #
Issue Date: 1999
Series Title: Journal of Vacuum Science & Technology A, Vacuum, Surfaces and Films vol:17 issue:2 pages:650-656
ISSN: 0734-2101
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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