|ITEM METADATA RECORD
|Title: ||Measurements of trace gaseous ambient impurities on an atmospheric pressure rapid thermal processor|
|Authors: ||Kondoh, Eiichi ×|
Gutt, T #
|Issue Date: ||1999 |
|Series Title: ||Journal of Vacuum Science & Technology A, Vacuum, Surfaces and Films vol:17 issue:2 pages:650-656|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
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