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|ITEM METADATA RECORD
|Title: ||Self-annealing characterization of electroplated copper films|
|Authors: ||Lagrange, Sébastien|
|Issue Date: ||1999 |
|Conference: ||European Workshop Materials for Advanced Metallization; March 8-10, 1999; Oostende, Belgium.|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Mechanical Metallurgy Section (-)|
Associated Section of ESAT - INSYS, Integrated Systems
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