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Title: Self-annealing characterization of electroplated copper films
Authors: Lagrange, Sébastien
Brongersma, Sywert
Judelewicz, Moshe
Saerens, Annelies
Vervoort, Iwan
Richard, Emmanuel
Palmans, Roger
Maex, Karen
Issue Date: 1999
Conference: European Workshop Materials for Advanced Metallization; March 8-10, 1999; Oostende, Belgium.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Mechanical Metallurgy Section (-)
Associated Section of ESAT - INSYS, Integrated Systems

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