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Title: Post dry-etch cleaning issues of an organic low-K dielectric
Authors: Lanckmans, Filip ×
Baklanov, Mikhaïl
Alaerts, Carine
Vanhaelemeersch, Serge
Maex, Karen #
Issue Date: 1999
Host Document: pages:89-92
Conference: Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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