Title: New plating path for electroless copper deposition on sputtered barrier layers
Authors: Lantasov, Yuri
Min, Woo Sig
Palmans, Roger
Maex, Karen
Issue Date: 1999
Conference: European Workshop Materials for Advanced Metallization; March 8-10, 1999; Oostende, Belgium. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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