Title: Impact of copper contacts on CMOS front-end yield and reliability
Authors: Van den Bosch, Geert ×
Demuynck, Steven
Tokei, Zsolt
Beyer, Gerald
Van Hove, Marleen
Groeseneken, Guido #
Issue Date: Dec-2006
Publisher: IEEE
Host Document: pages:93-96
Conference: International Electron Devices Meeting - IEDM. Technical Digest location:Leuven Belgium date:11/12/06
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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