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Title: Comparative study of Ni-silicide and Co-silicide for sub 0.25 ?m technologies
Authors: Lauwers, A
Besser, Paul
Gutt, T
Satta, Alessandra
de Potter de ten Broeck, Muriel
Lindsay, Richard
Roelandts, Nico
Loosen, Freddy
Stucchi, Michele
Vrancken, Christa
Deweerdt, Bruno
Maex, Karen
Issue Date: 1999
Conference: European Workshop Materials for Advanced Metallization; March 8-10, 1999; Oostende, Belgium.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Physics and Astronomy - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems

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