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|ITEM METADATA RECORD
|Title: ||Comparative study of Ni-silicide and Co-silicide for sub 0.25 ?m technologies|
|Authors: ||Lauwers, A|
de Potter de ten Broeck, Muriel
|Issue Date: ||1999 |
|Conference: ||European Workshop Materials for Advanced Metallization; March 8-10, 1999; Oostende, Belgium.|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Physics and Astronomy - miscellaneous|
Associated Section of ESAT - INSYS, Integrated Systems
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