Electrochemical Society Fall Meeting: Interconnects and Contact Metallization for ULSI, Date: 1999/10/01 - 1999/10/01, Location: Honolulu, HA, USA
Publication date:
1999-01-01
Author:
Lemaire, JJ
Rajagopal, A ; Gregoire, C ; Pireaux, JJ ; Maex, Karen ; Waeterloos, Joost